We present a morphologic and spectroscopic study of cluster-assembled TiO (x) films deposited by supersonic cluster beam source on clean silicon substrates. Data show the formation of nanometer-thick and uniform titanium silicides film at room temperature (RT). Formation of such thick TiSi (x) film goes beyond the classical interfacial limit set by the Ti/Si diffusion barrier. The enhancement of Si diffusion through the TiO (x) film is explained as a direct consequence of the porous film structure. Upon ultra high vacuum annealing beyond 600 A degrees C, TiSi2 is formed and the oxygen present in the film is completely desorbed. The morphology of the nanostructured silicides is very stable for thermal treatments in the RT-1000 A degrees C range, with a slight cluster size increase, resulting in a film roughness an order of magnitude smaller than other TiO (x) /Si and Ti/Si films in the same temperature range. The present results might have a broad impact in the development of new and simple TiSi synthesis methods that favour their integration into nanodevices.

Chiodi, M., Cavaliere, E., Kholmanov, I., Simone, M. R., Sakho, O., Cepek, C., Gavioli, L., Nanostructured TiOx film on Si substrate: room temperature formation of TiSix nanoclusters, <<JOURNAL OF NANOPARTICLE RESEARCH>>, 2010; 12 (7): 2645-2653. [doi:10.1007/s11051-009-9843-3] [http://hdl.handle.net/10807/4998]

Nanostructured TiOx film on Si substrate: room temperature formation of TiSix nanoclusters

Chiodi, Mirco;Cavaliere, Emanuele;Kholmanov, Iskandar;Cepek, Cinzia;Gavioli, Luca
2010

Abstract

We present a morphologic and spectroscopic study of cluster-assembled TiO (x) films deposited by supersonic cluster beam source on clean silicon substrates. Data show the formation of nanometer-thick and uniform titanium silicides film at room temperature (RT). Formation of such thick TiSi (x) film goes beyond the classical interfacial limit set by the Ti/Si diffusion barrier. The enhancement of Si diffusion through the TiO (x) film is explained as a direct consequence of the porous film structure. Upon ultra high vacuum annealing beyond 600 A degrees C, TiSi2 is formed and the oxygen present in the film is completely desorbed. The morphology of the nanostructured silicides is very stable for thermal treatments in the RT-1000 A degrees C range, with a slight cluster size increase, resulting in a film roughness an order of magnitude smaller than other TiO (x) /Si and Ti/Si films in the same temperature range. The present results might have a broad impact in the development of new and simple TiSi synthesis methods that favour their integration into nanodevices.
2010
Inglese
Chiodi, M., Cavaliere, E., Kholmanov, I., Simone, M. R., Sakho, O., Cepek, C., Gavioli, L., Nanostructured TiOx film on Si substrate: room temperature formation of TiSix nanoclusters, <<JOURNAL OF NANOPARTICLE RESEARCH>>, 2010; 12 (7): 2645-2653. [doi:10.1007/s11051-009-9843-3] [http://hdl.handle.net/10807/4998]
File in questo prodotto:
Non ci sono file associati a questo prodotto.

I documenti in IRIS sono protetti da copyright e tutti i diritti sono riservati, salvo diversa indicazione.

Utilizza questo identificativo per citare o creare un link a questo documento: https://hdl.handle.net/10807/4998
Citazioni
  • ???jsp.display-item.citation.pmc??? ND
  • Scopus 11
  • ???jsp.display-item.citation.isi??? 10
social impact